Related Articles Thermal annealing effect on material characterizations of β-Ga2O3 epilayer grown by metal organic chemical vapor deposition Appl. Phys. Lett. 102, 011119 (2013) Crystallinity of inorganic films grown by atomic layer deposition: Overview and general trends J. Appl. Phys. 113, 021301 (2013) Crystallinity of inorganic films grown by atomic layer deposition: Overview and general tr...

In order to obtain a good passivation of a silicon surface, more and more stack passivation schemes have been used in high-efficiency silicon solar cell fabrication. In this work, we prepared a-Si:H(i)/Al2O3 stacks on KOH solution-polished n-type solar grade mono-silicon(100) wafers. For the Al2O3 film deposition, both thermal atomic layer deposition (T-ALD) and plasma enhanced atomic layer dep...

............................................................................................................................ 5 List of Publications............................................................................................................ 6 List of Acronyms Used ..................................................................................................... 7