This paper describes a simple process of adhesive bonding between a glass lid and a SU-8 microfluidic device. The bonding is made by applying pressure, between 1.24 MPa – 3.72 MPa, and heat above the SU-8 glass transition temperature (Tg). The advantages of this process are low cost, simplicity and no need of extra adhesive material, which could block microchannels and inlets. The SU-8 microcha...

We have described a new and promising strategy for the fabrication of composite and porous photonic crystal microparticles that combines the self-assembly of colloidal particles with photolithography techniques. We fabricated silica/SU-8 composite microparticles with photonic bandgaps via four steps: (1) deposition of the silica colloidal crystals on the photoresist, (2) embedding of the colloi...

This article describes a new low-cost rapid microfabrication technology for high-density interconnects and passive devices on flexible substrates for sensing applications. Silver nanoparticles with an average size of 80 nm were used to create a conductive SU-8 mixture with a concentration of wt 25%. The patterned structures after hard baking have a sheet resistance of 11.17 Ω /□. This conductiv...

We report on the fabrication of desired magneto-photonic devices by a low one-photon absorption (LOPA) direct laser writing (DLW) technique on a photocurable nanocomposite consisting of magnetite ( Fe 3 O 4 ) nanoparticles and a commercial SU-8 photoresist. The magnetic nanocomposite was synthesized by mixing Fe 3 O 4 nanoparticles with different kinds of SU-8 photoresists. We demonstrated that...

The biocompatibility and biofouling of the microfabrication materials for a MEMS drug delivery device have been evaluated. The in vivo inflammatory and wound healing response of MEMS drug delivery component materials, metallic gold, silicon nitride, silicon dioxide, silicon, and SU-8(TM) photoresist, were evaluated using the cage implant system. Materials, placed into stainless-steel cages, wer...

We report microstructures of SU-8 photo-sensitive polymer with high-aspect-ratio, which is defined as the ratio of height to in-plane feature size. The highest aspect ratio achieved in this work exceeds 250. A multi-layer and single-photon lithography approach is used in this work to expose SU-8 photoresist of thickness up to 100 μm. Here, multi-layer and time-lapsed writing is the key concept ...

A 96-well solid-phase reversible immobilization (SPRI) reactor plate was designed to demonstrate functional titer plate-based microfluidic platforms. Nickel, large area mold inserts were fabricated using an SU-8 based, UV-LIGA technique on 150 mm diameter silicon substrates. Prior to UV exposure, the prebaked SU-8 resist was flycut to reduce the total thickness variation to less than 5 mum. Exc...