A silicon micromachining method that is able to create deep silicon dioxide blocks at selected locations in a silicon substrate is presented. The process combines deep-reactive-ion etching (DRIE), thermal oxidation, deposition of silicon dioxide and optional planarization. Design issues and parameters for the creation of such blocks are discussed. The selectively defined silicon dioxide blocks ...

Silicon photonics has generated an increasing interest in recent years mainly for optical communications optical interconnects in microelectronic circuits or bio-sensing applications. The development of elementary passive and active components (including detectors and modulators), which are mainly fabricated on the silicon on insulator platform for CMOS-compatible fabrication, has reached such ...

The photovoltaic and the semiconductor industries are in growth and it is necessary to supply a large amount of silicon to maintain this growth. Since silicon is still the best material for the manufacturing of solar cells and semiconductor components so the pure silicon like solar grade and semiconductor grade materials are demanded. There are two main routes for silicon production: metallurgi...

Silicon-on-nitride ridge waveguides are demonstrated and characterized at midand near-infrared optical wavelengths. Silicon-on-nitride thin films were achieved by bonding a silicon handling die to a silicon-on-insulator die coated with a low-stress silicon nitride layer. Subsequent removal of the silicon-on-insulator substrate results in a thin film of silicon on a nitride bottom cladding, read...

Optimization of the acoustic resonant sensor requires a clear understanding of how the output responses of the sensor are affected by the variation of different factors. During this work, output responses of a capacitive acoustic transducer, such as membrane displacement, quality factor, and capacitance variation, are considered to evaluate the sensor design. The six device parameters taken int...

This paper reports an investigation into the use of CFD methods for modelling the combined fluid flow and heat transfer in a generic combustor heatshield geometry typical of current aeroengine designs. The study describes the development and testing of a conjugate heat transfer methodology, to allow the CFD code to predict the heat exchange in both fluid and solid regions of the solution domain...

We report on the epitaxial growth of crystalline silicon films on (100) oriented crystalline silicon substrates by standard plasma enhanced chemical vapor deposition at 175 °C. Such unexpected epitaxial growth is discussed in the context of deposition processes of silicon thin films, based on silicon radicals and nanocrystals. Our results are supported by previous studies on plasma synthesis of...

Silicon plays an important role in providing tolerance to various abiotic stresses and augmenting plant resistance against diseases. However, there is a paucity of reports about the effect of silicon on bacterial and viral pathogens of plants. In general, the effect of silicon on plant resistance against bacterial diseases is considered to be due to either physical defense or increased biochemi...

A new method of fabricating high aspect ratio nanostructures in silicon without the use of sub-micron lithographic technique is reported. The proposed method comprises two important steps including the use of CMOS spacer technique to form silicon nitride nanostructure masking followed by deep reactive ion etching (DRIE) of the silicon substrate to form the final silicon nanostructures. Silicon ...

A brief survey is given of the thermochemistry of a number of silicon-containing substances that are of interest in modern technology. Among those discussed are: silicalite (SiO2), silicon disulfide (SiS2), the crystalline and vitreous forms of silicon diselenide (SiSen), silicon sesquitelluride (Si2Te3), silicon nitride (Si3N4), and vanadium disilicide (VSi2).