/Description The PS-rich and neutral PS-b-PMMA block copolymer (BCP) films were spin coated on the neutral random copolymer hydroxyl-terminated PS-r-PMMA layers grafted on the native oxide and 50 nm thick PECVD amorphous silicon oxide layers. Relationship between the grafting density of BCP and surface density of hydroxyl moiety on silicon oxide is discussed. Furthermore, optimization of anneal...

Amorphous and nano-crystalline germanium is of potential interest for a wide range electronic, optical, opto-electronic photovoltaic applications. In this work the influence deposition temperature on hydrogenated (Ge:H) films was characterized, using over 200 Ge:H 70 SiGe:H films. The demonstrated temperature-induced densification resulted in more stable with lower bandgap energy dark conductiv...