نتایج جستجو برای: photoresist

تعداد نتایج: 1295  

Journal: :IEEJ Transactions on Sensors and Micromachines 2002

Journal: :Journal of Micromechanics and Microengineering 2003

Journal: :Proceedings of the ... International Symposium on Microelectronics 2021

Abstract With the rapidly expanding range of design and integration flows required for advanced packaging, both foundries OSATs alike are evaluating new types materials additive manufacturing - this is especially pertinent resist galvanic plating baths. This problem far from (1), it a part regularly re-evaluation process-material interactions (2) packaging schemes, driven by changes in design, ...

Journal: :Journal of Photopolymer Science and Technology 2006

Journal: :Journal of the Korean Vacuum Society 2008

Journal: :Journal of Photopolymer Science and Technology 1994

2010
M. W. Denhoff

Amorphous fluoropolymer films have low dielectric constants and high chemical resistance and, so, have potential to be used as the insulator for high speed interconnects and as protection layers. Many applications would require high resolution patterning of the fluoropolymer film. We have found that these films are easily etched by reactive ion beam etching using an O2/Ar gas mixture. High etch...

Journal: :Nano letters 2006
Arvind Sundaramurthy P James Schuck Nicholas R Conley David P Fromm Gordon S Kino W E Moerner

Optically resonant metallic bowtie nanoantennas are utilized as fabrication tools for the first time, resulting in the production of polymer resist nanostructures <30 nm in diameter at record low incident multiphoton energy densities. The nanofabrication is accomplished via nonlinear photopolymerization, which is initiated by the enhanced, confined optical fields surrounding the nanoantenna. Th...

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