Open-access microcavities are a powerful tool to enhance light–matter interactions for solid-state quantum and nanosystems key advance applications in technologies. For this purpose, the cavities should simultaneously meet two conflicting requirements—full tunability cope with spatial spectral inhomogeneities of material highest stability under operation cryogenic environment maintain resonance...

Flexure-based mechanisms, also referred to as flexures, are widely being used as motion-guidance, or bearing, elements in applications requiring multi-degree-of-freedom positioning and alignment. Unlike friction-bearings (such as sliding or rolling contact bearings), flexures can be designed to offer, to a large extent, reliable linear elastic motion with a high resolution (on the order of nano...

Abstract Uniform molding and demolding of structures on highly curved surfaces through conformal contact is a crucial yet often-overlooked aspect nanoimprint lithography (NIL). This study describes the development NIL tool its integration into nanopositioning nanomeasuring machine to achieve high-precision orthogonal for soft ultraviolet-assisted (soft UV-NIL). The process was implemented prima...

Output reference tracking can be improved by iteratively learning from past data to inform the design of feedforward control inputs for subsequent attempts. This process is called iterative (ILC). article develops a method apply ILC systems with nonlinear discrete-time dynamical models unstable inverses (i.e., nonminimum phase models). class includes piezoactuators, electric power converters, a...

The generation of a time-optimal feedrate trajectory has received significant attention in CNC machining and robotics applications. Most of the existing feedrate planning algorithms take velocity and acceleration into the consideration for capability constraints. The introduction of higher order dynamic states, such as jerk and/or jounce into the feedrate scheduling problem makes generating com...

This paper aims at control design and its implementation for robust high-bandwidth precision (nanoscale) positioning systems. Even though modern model-based control theoretic designs for robust broadband high-resolution positioning have enabled orders of magnitude improvement in performance over existing model independent designs, their scope is severely limited by the inefficacies of digital i...