Abstract The majority of nanopositioning and nanomeasuring machines (NPMMs) are based on three independent linear movements in a Cartesian coordinate system. This combination with the specific nature sensors tools limits addressable part geometries. An enhancement an NPMM is introduced by implementation rotational while keeping precision nanometer range. For this purpose, parameter-based dynami...

Classical proportional-integral-derivative (PID) control is exploited widely in industrial motion systems with dry friction motivated by the intuitive and easy-to-use design tuning tools available. However, classical PID suffers from severe performance limitations. In particular, friction-induced limit cycling (i.e., hunting) observed when integral employed on frictional that suffer Stribeck ef...

Piezo-actuated stage (P-AS) has become the topic of considerable interest in realm micro/nanopositioning technology recent years owing to its advantages, such as high positioning accuracy, response speed, and large output force. However, rate-dependent (RD) hysteresis, which is an inherent nonlinear property piezoelectric materials, considerably restricts application P-AS. In this research pape...