نتایج جستجو برای: titanium nitride thin film reactive sputtering

تعداد نتایج: 388612  

2011
J. Hüpkes H. Zhu J. I. Owen G. Jost E. Bunte

Texture etched zinc oxide is often used as transparent front contact for silicon thin film solar cells. Reactive sputtering is a potentially low-cost process. However, process stability, film uniformity, and reproducibility are challenges to be solved. Oscillations of the control signal and subsequent reaction of the plasma emission control with moving substrates from rotatable metallic targets...

2009
M. Yang T. P. Chen Y. Liu J. I. Wong

In this work, visible electroluminescence (EL) from aluminum nitride (AlN) thin film containing aluminum nanocrystals (nc-Al) prepared by a radio frequency sputtering technique is reported. The yellow EL shows a spectrum peaked at 565 nm. A linear relationship between the EL and the current transport in the nc-Al/AlN nanocomposite thin film is observed, and both the current transport and the EL...

2012
Juergen M. Lackner Wolfgang Waldhauser Paul Hartmann Franz Bruckert Marianne Weidenhaupt Roman Major Marek Sanak Martin Wiesinger Daniel Heim

Biocompatibility improvements for blood contacting materials are of increasing interest for implanted devices and interventional tools. The current study focuses on inorganic (titanium, titanium nitride, titanium oxide) as well as diamond-like carbon (DLC) coating materials on polymer surfaces (thermoplastic polyurethane), deposited by magnetron sputtering und pulsed laser deposition at room te...

2016
Jinn P. Chu Chia-Chi Yu Yusuke Tanatsugu Mikito Yasuzawa Yu-Lin Shen

This paper reports on the use of Zr-based (Zr53Cu33Al9Ta5) thin film metallic glass (TFMG) for the coating of syringe needles and compares the results with those obtained using titanium nitride and pure titanium coatings. TFMG coatings were shown to reduce insertion forces by ∼66% and retraction forces by ∼72%, when tested using polyurethane rubber block. The benefits of TFMG-coated needles wer...

Journal: :Nano Energy 2021

There is a high demand for novel flexible micro-devices energy harvesting from low-frequency and random mechanical sources. The research of new functional designs required to strategically enhance the performances increase control on flexibility. In this work we report fabrication characterization bi-stable statically balanced thin-film piezoelectric transducers based Aluminum Nitride (AlN). de...

2009
Teppei Onuki Hiroki Kuwano

A thin film process using ECR-ion beam sputtering with ultra pure (99.999999%) copper target was investigated for improving transportation properties in the film. The electric resistivity of the thin film was 40% lower than that of using a commercial-grade purity target. And the optical qualities evaluated by the transmission and reflection spectrum measurements were also indicate slower relaxa...

2015
Martin Amberg Alexander Haag Raphael Storchenegger Patrick Rupper Frederike Lehmeier René M Rossi Dirk Hegemann

We report on the optical properties of thin titanium suboxide (TiO x ) films for applications in laser transmission welding of polymers. Non-absorbing fibers were coated with TiO x coatings by reactive magnetron sputtering. Plasma process parameters influencing the chemical composition and morphology of the deposited thin films were investigated in order to optimize their absorption properties....

2008
Anuradha S K. Rajanna

Tin oxide thin film deposited on to glass substrates by the process of DC reactive magnetron sputtering has been used in our work. These films were characterized for their thermoelectric behavior. Further, a novel method has been developed to enhance the Seebeck coefficient of these films. Prior to the oxide film deposition on the glass substrate, thin metal films have been deposited at the two...

2003
Hai-Ning Cui Vasco Teixeira

Amorphous Tungsten Oxide (alpha-WO3) film is one of the most studied electrochromic (EC) materials. It can be used as EC layer in EC devices. Electrochromism can be described as reversible change optical properties, by an applied external voltage. Here alpha-WO3 thin films were deposited onto glass and ITO substrates by reactive DC magnetron sputtering for EC application. Growth temperature, ox...

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