Fast (kinetic energy of 10 to some 100 eV) neutral beams can be used for etching, deposition or surface modification, without charging damage that may occur in conventional plasma processing of materials. This paper provides an overview of the modeling and simulation approaches applicable to neutral beam sources. Neutral beam sources based on both volume and surface neutralization of ions are d...

Plasma processes cause current to flow through the thin oxide and the resultant plasma-induced damage can be simulated and modelled as damage produced by constant-current (or voltage) electrical stress. Plasma processing causes MOSFET parameter degradation, from which one can deduce the plasma charging current. Since the scattering of post-damage device parameters is due to a reproducible varia...

Energy poverty at the household level is a serious hindrance to economic and social development, especially in off-grid, remote villages in the developing world. Some initiatives have sought to provide these households with resources such as renewable generation units and electric batteries to enable access to electricity. At present, these resources are operated in isolation, fulfilling indivi...

Electron beam lithography is a viable option for exposure of high-resolution patterns such as t-gates in GaAs manufacturing, in part due to the speed and ease of use of modern electron beam direct write tools. In order to achieve greater speed, these tools utilize higher beam current densities and variable shaped beams. The resulting higher beam currents at the resist surface, however, can crea...

The corona-charged fibrous electrets are dielectric materials exhibiting quasi-permanent electrical charge imparted by means of corona discharge process. The electrical charge in the electret fibrous materials has been utilized to capture hazardous particles from complex air streams. Air filters of this kind are widely used as respirators and face masks in personal protective equipments, dust c...

Fully Electric Vehicles (FEVs) hold the promise, if widely adopted, of drastically reducing carbon emissions from surface transport and could, therefore, form a major thrust in the global efforts to meet the emissions reduction targets. In the UK, the effect of widespread adoption of FEVs would be manageable on the electricity grid at the 132kV level, but the same is not true for the local dist...

As an important part of the smart grid, Electric Vehicles (EVs) could be a good measure against energy shortages and environmental pollutions. In this paper, based on the relevant EVs development policy, the private EVs charging load is investigated. Based on statistical data, the Monte Carlo method is applied to determine the one-trip driven distance for the private EV. And by analyzing the EV...