Abstract The edge detection of microstructures by microscopes is poor in resolution due to the effect of diffraction limit. This paper proposes a new technique by using the focus probe in association with a nanopositioning stage. The edge is detected by the total energy reflection principle and the step height is detected by the astigmatic principle. Both methods can realize the resolution of 1...

Ferroelectric and magnetic transducers are utilized in large number of applications, including nanopositioning, fluid pumps, high-speed milling, and vibration control/suppression. However, the physical mechanisms which make these materials highly effective transducers inherently introduce nonlinear, hysteretic behavior that must be incorporated in models and control designs. This significantly ...

Abstract Since the first realization of two-photon direct laser writing (DLW) in Maruo et al. (Opt Lett 22:132–134, 1997), manufacturing using techniques spread out many laboratories all over world. Photosensitive materials with different material properties open a new field for micro- and nanofabrication. The achievable structuring resolution this technique is reported to be sub-100 nm (Paz J....

Ferroelectric and ferromagnetic materials are employed as both actuators and sensors in a wide variety of applications including fluid pumps, nanopositioning stages, sonar transducers, vibration control, ultrasonic sources, and high-speed milling. They are attractive because the resulting transducers are solid-state and often very compact. However, the coupling of field to mechanical deformatio...

In applications where high precision in micro- and nanopositioning is required, piezoelectric actuators (PEA) are an optimal micromechatronic choice. However, the accuracy of these devices affected by a natural phenomenon called “hysteresis” that even increases instability system. This anomaly can be counteracted through material re-shape or design control strategy. Through this research, novel...