A study was conducted to demonstrate the applications of microcantilevers in biomedical and thermo/fluid fields. The deflection of the microcantilevers due to biomaterial and turbulence effects was highlighted in this work. The novel patented microcantilever assemblies that were presented in this study can increase the signal and decrease the unfavorable deflection due to flow disturbances. Thi...

Nitrate-sensing system that consists of a micromachined sensor substrate, nitrate-permeable membrane, integrated microfluidic channels, and standard fluidic connectors has been designed, fabricated, assembled, and tested. Our microsensor was designed for in-situ monitoring of nitrate concentrations in ground water. A silver electrode was patterned for amperometric nitrate detection. An electroc...

The modeling and fabrication of a magnetic microsensor based on a magneto-transistor were presented. The magnetic sensor is fabricated by the commercial 0.18 mm complementary metal oxide semiconductor (CMOS) process without any post-process. The finite element method (FEM) software Sentaurus TCAD is utilized to analyze the electrical properties and carriers motion path of the magneto-transistor...

The second prototype of a power-aware microsensor node has been developed for the MIT μAMPS project. The improvements from the previous generation include smaller footprint size of the node to facilitate unobtrusive sensing, baseband and slave snap-on modules, additional hardware controls at all levels for precise power manipulation, improvements in the radio performance that allow for transmis...

A micro system for measuring the relative displacements between a bone and an implant in a prosthetic hip of a human being has been realized. Novel are the small dimensions of the system combined with the possibility to measure relative displacements in three directions. The system consists of a microsensor body, a mechanical transducer element made by precision mechanics, electronics, and the ...

Microfabrication processes for chemical and biochemical sensors are reviewed. Standard processing steps originating from semiconductor technology are detailed, and specific micromachining steps to fabricate three-dimensional mechanical structures are described. Fundamental chemical sensor principles are briefly abstracted and corresponding state-of-the-art examples of microfabricated chemical s...

Amperometric detection of nitric oxide with ISO-NOPMC NO microsensors (WPI) is systemically studied in the six media including seawater. The linear range of the microsensor for NO was from 10 to 10 mol/l and the detection limit was 4.2×10 mol/L(S/N=2). With this method, we provide preliminary evidence that NO production could be a general attribute of marine alga (Haeterosigma akashiwo). Experi...

We report evidence that a porphyrinic microsensor for detection of nitric oxide (NO) also detects biologically relevant concentrations of tyrosine (Tyr) in dog brain. Tyr is oxidized by this sensor at the same potential as NO, and the sensitivity for NO and Tyr are of the same order of magnitude. The interference from Tyr is of importance because 1) Tyr is abundant and 2) there is a concentrati...

Micromachining and MEMS technologies can be used to produce complex electrical, mechanical, fluidic, thermal, optical, and magnetic structures, devices, and systems on a scale ranging from organs to subcellular organelles. This miniaturization ability has enabled MEMS to be applied in many areas of biology, medicine, and biomedical engineering – a field generally referred to as BioMEMS. The fut...