Micro- and nanocantilevers are increasingly employed as mass sensors. Most studies consider the first flexural mode and adsorbed masses that are either discretely attached or homogeneously distributed along the entire length of the cantilever. We derive general expressions that allow for the determination of the total attached mass with any mass distribution along the cantilever length and all ...

Gyroscopes are used as rotation rate sensors. Conventional gyroscopes are heavy and bulky, which creates important problems regarding their usage in different applications. Micro-gyroscopes have solved these problems due to their small size. The beam micro-gyroscope is one of the popular types of inertial sensors. Their small dimensions and low energy consumption are key reasons for their popul...

This paper describes the significance of iterative approach and structure damping analysis which help to get better performance validation shunt capacitive RF MEMS switch. The micro-cantilever based electrostatic ally actuated switch is designed after multiple iterations on cantilever a modification obtained that requires low actuation voltage 7.3 V for 3 ?m deformation. To validate we have per...

the resonant frequency and sensitivity of an atomic force microscope (afm) cantilever with assembled cantilever probe (acp) have been analyzed and a closed-form expression for the sensitivity of vibration modes has been obtained. the proposed acp comprises an inclined cantilever and extension, and a tip located at the free end of the extension, which makes the afm capable of topography at sidew...

The monitoring of the deflection of a micro-cantilever, as the end of a sharp probe mounted at its end, i.e. the tip, interacts with a surface, forms the foundation of atomic force microscopy AFM. In a nutshell, developments in the field are driven by the requirement of obtaining ever increasing throughput and sensitivity, and enhancing the versatility of the instrument to simultaneously map th...

In the present work the pull-in voltage of a micro cracked cantilever beam subjected to nonlinear electrostatic pressure was studied. Two mathematical models were employed for modeling the problem: a lumped mass model and a classical beam model. The effect of crack in the lumped mass model is the reduction of the effective stiffness of the beam and in the beam model; the crack is modeled as a m...

The development of strong, tough, and damage-tolerant ceramics requires nano/microstructure design to utilize toughening mechanisms operating at different length scales. The toughening mechanisms so far known are effective in micro-scale, then, they require the crack extension of more than a few micrometers to increase the fracture resistance. Here, we developed a micro-mechanical test method u...

The nonlinear pull-in behaviors of various electrostatic micro-actuators were simulated. The differential quadrature method (DQM) was applied to overcome the difficulty in solving the nonlinear equation of motion. Various types of micro-actuators, such as the cantilever beam actuator and the fixed-fixed beam actuator were derived and simulated to examine the feasibility of applying the DQM to t...

This paper aims at developing a force-guided microassembly technology with in-situ flexible polyvinylidene fluoride (PVDF) beam force sensing and hybrid force/position control based on an infinite dimensional model of the flexible sensor structure. Besides the designed 1-D PVDF cantilever based microforce sensor, as the soft sensor structure itself is installed at the free end of micromanipulat...

This paper presents a review of micro- and nano-structure based oligonucleotide detection and quantification techniques. The characteristics of such devices make them very attractive for Point-of-Care or On-Site-Testing biosensing applications. Their small scale means that they can be robust and portable, their compatibility with modern CMOS electronics means that they can easily be incorporate...