In ion trap quantum information processing, efficient fluorescence collection is critical for fast, high-fidelity qubit detection and ion–photon entanglement. The expected size of future many-ion processors requires scalable light collection systems. We report on the development and testing of a microfabricated surface-electrode ion trap with an integrated high-numerical aperture (NA) micromirr...

By using a CMOS compatible process technology, a MEMS variable optical attenuator (VOA) is characterized in terms of actuation mechanisms. A dual-fiber collimator is aligned perpendicularly to the micromirror in a three-dimensional (3D) free space configuration, where the micromirror is mechanically connected with an electromagnetic actuator and two sets of electrothermal actuators. Three types...

Simulation of moving vehicle tracking has been demonstrated using hyperspectral and polarimetric imagery (HSI/PI). Synthetic HSI/PI image cubes of an urban scene containing moving vehicle content were generated using the Rochester Institute of Technology’s Digital Imaging and Remote Sensing Image Generation (DIRSIG) Megascene #1 model. Video streams of sensor-reaching radiance frames collected ...

Fabrication of high density oligonucleotide arrays using metal on glass photolithographic masks is inflexible and expensive. Maskless methods using computer-controlled projection have been proposed and implemented, but associated stray light effects on photodirected oligonucleotide synthesis and their analysis have not been reported. We have developed a theoretical approach: it predicts that th...

LIDAR (LIght Detection And Ranging) is an important method in measuring atmospheric transparency that is used to correct fluorescence light yield from extensive air showers. For the JEM-EUSO (Extreme Universe Space Observatory on Japanese Experimental Module) mission to observe ultra-high cosmic rays at the ISS (International Space Station) orbiting at 400 km altitude the method is used also to...

This letter describes a simple method for three-dimensional microfabrication of complex, high-aspect-ratio structures with arbitrary surface height profiles in bulk silicon. The method relies on the exploitation of reactive ion etching lag to simultaneously define all features using a single lithographic masking step. Modulation of the mask pattern openings used to define the features results i...

This paper reports the fabrication of a bulk micromachined hybrid torsional micromirror device composed of titanium mirror structures bonded to an underlying silicon sloping electrode structure. The fabrication of the device is enabled by two recent innovations: 1) the Metal Anisotropic Reactive Ion etching with Oxidation (MARIO) Process [1], which provides, for the first time, high aspect rati...

A general theoretical model using the coupling effect between the torsion and bending is presented in this paper, which characterizes the static properties of the electrostatic torsional micromirror, especially its pull-in effect. A set of normalized equations governing the static actuation properties of the torsional micromirror based on the parallel plate capacitor model is derived to demonst...