نتایج جستجو برای: enhanced atomic layer deposition

تعداد نتایج: 767218  

Journal: :Accounts of Chemical Research 2015

Journal: :Journal of Vacuum Science & Technology A 2021

Journal: :Nanotechnology 2010
Shih-Yen Lin Chi-Che Tseng Tung-Hsun Chung Wen-Hsuan Liao Shu-Han Chen Jen-Inn Chyi

Atomically-flat surfaces are obtained after thin GaAsSb buffer layer growth on GaAs substrates with regular-distributed nano-holes formed after oxide desorption of the local atomic-force-microscopy anode oxidation. Different from the samples with GaAsSb buffer layers, increasing surface root-mean-square roughness is observed for the GaAs-buffered samples with increasing GaAs buffer layer thickn...

Journal: :Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 2012

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