Micro-cantilever sensors for mass detection using resonance frequency have attracted considerable attention over the last decade in the field of gas sensing. For such a sensing system, an oscillator circuit loop is conventionally used to actuate the micro-cantilever, and trace the frequency shifts. In this paper, gas experiments are introduced to investigate the mechanical resonance frequency s...

Metal alloys have material properties that are very appealing for micro electro mechanical systems (MEMS), but present a challenge for process integration within a lithographic manufacturing sequence of the type used in the semiconductor industry. The batch-mode micro electrodischarge machining (μEDM) discussed here uses lithographically-fabricated electrode arrays with high density and high un...

Grain size effects on the physical properties of polycrystalline ferroelectrics have been extensively studied for decades; however there are still major controversies regarding the dependence of the piezoelectric and ferroelectric properties on the grain size. Dense BaTiO3 ceramics with different grain sizes were fabricated by either conventional sintering or spark plasma sintering using micro-...

A study of the optoelectronic properties of strained 40 nm Ga1-xInxN layers on GaN films is presented. The fact of pseudomorphic strain leads to a new interpretation of the film composition when derived from x-ray scattering. In addition we directly confirm that strain induces huge piezoelectric fields in this uniaxial system by the observation of Franz-Keldysh oscillations in photoreflection. ...

Recently, piezoelectric transducer has been used for generation and detection of ultrasound. in medical ultrasound equipment and ultrasound non-destructive inspection equipment. In our laboratory, we fabricated a piezoelectric transducer with PZT poly-crystalline film deposited on the titanium substrate by a hydrothermal synthesis method which is one of crystal growth technology. Fabrication of...

Micro piezoelectric vibration generator has a wide application in the field of microelectronics. Its natural frequency is unchanged after being manufactured. However, resonance cannot occur when the natural frequencies of a piezoelectric generator and the source of vibration frequency are not consistent. Output voltage of the piezoelectric generator will sharply decline. It cannot normally supp...