In this study, we present selected reliability issues of double gate dielectric stacks for non-volatile semiconductor memory (NVSM) applications. Fabricated gate structures were consisted of PECVD silicon oxynitride layer (SiOxNy) as the pedestal layer and hafnium dioxide layer (HfO2) as the top gate dielectric. In the course of this work, obtained MIS structures were investigated by means of c...

Due to their polymorphism, TiO2 films are quintessential components of state-of-the-art functional materials and devices for various applications from dynamic random access memory solar water splitting. However, contrary other semiconductors/dielectric materials, the relationship between structural/morphological electrical properties at nano microscales remains unclear. In this context, morphol...

The scope of this work was to optimize the reactant delivery parameters for plasma enhanced chemical vapor deposition (PECVD) p-type Cu2O films from Cu(hfac)(tmvs), with aim explore an alternative other large-area techniques such as sputtering. While n-type metal oxide semiconductors amorphous indium gallium zinc have now been developed and offer significantly improved device performance over h...

We report on low-temperature and low-pressure deposition conditions of 140 °C 1.5 mTorr, respectively, to achieve high-optical quality silicon nitride thin films. deposit the films using an electron cyclotron resonance plasma-enhanced chemical vapour (ECR-PECVD) chamber with Ar-diluted SiH4, N2 gas. Variable-angle spectroscopic ellipsometry was used determine thickness refractive index films, w...

Diamond-like carbon (DLC) coatings are recognized for a broad range of industrial applications due to their superior mechanical properties such as high hardness, low friction, and promising wear resistance. DLC commonly produced with physical vapour deposition (PVD) plasma-enhanced chemical (PECVD) methods. New markets emerging in electronics, biomedical, additive manufacturing textiles sectors...

The influence of diamond like carbon films properties on quantum efficiency of prepared transmission photocathodes has been investigated. DLC films were deposited on silicon substrate and stainless steel mesh by PECVD using methane, argon and hydrogen or deuterium gas mixtures. Photocathodes prepared with deuterated DLC film have higher quantum efficiency than photocathodes prepared with hydrog...