نتایج جستجو برای: nanopositioning

تعداد نتایج: 224  

Journal: :Measurement 2023

The objective of precision systems design is to obtain machines with very high and totally predictable work-zone accuracies. In already functional systems, where the errors can be measured, this achieved by error correction compensation. aim work propose an uncertainty budget methodology final measuring precise after case study a nanopositioning platform, referred as NanoPla, confocal sensor in...

2009
Garrett M. Clayton Szuchi Tien Kam K. Leang Qingze Zou Santosh Devasia

Control can enable high-bandwidth nanopositioning needed to increase the operating speed of scanning probe microscopes (SPMs). High-speed SPMs can substantially impact the throughput of a wide range of emerging nanosciences and nanotechnologies. In particular, inversion-based control can find the feedforward input needed to account for the positioning dynamics and, thus, achieve the required pr...

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