For the past six years, Digital Light Processing technology from Texas Instruments has made significant inroads in the projection display market. With products enabling the world’s smallest data and video projectors, HDTVs, and digital cinema, DLP technology is extremely powerful and flexible. At the heart of these display solutions is Texas Instruments Digital Micromirror Device (DMD), a semic...

The 3D integration of hybrid chips is a viable approach for the micro-optical technologies to reduce the costs of assembly and packaging. In this paper a technology platform for the hybrid integration of MOEMS components on a reconfigurable free-space silicon micro-optical bench is presented. In this approach a desired optical component (e.g. micromirror, microlens) is integrated with removable...

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We present a high-speed optical beamsteering system based on an 8x8 MEMS phased array. The system incorporates an in situ interferometer that provides a real-time, dynamic measure of the phase of each mirror in the array during beamsteering. A closed-loop phase-control algorithm results in <π/100 mirror phase accuracy and far field beam steering is shown. Stroboscopic measurement capabilities a...