A 2 DOF resonant thorax structure has been designed and fabricated for the MFI project. Miniature piezoelectric PZN-PT unimorph actuators were fabricated and used to drive a four-bar transmission mechanism. The current thorax design utilizes two actuated four-bars and a spherical joint to drive a rigid wing. Rotationally compliant flexure joints have been tested with lifetimes over 10 cycles. W...

This work enhances the driving sensitivity of micromechanical vibro-impact resonators by reducing output switching gap. Differing from previous works for gap narrowing that either require a dedicated pull-in bias voltage and stopper structures or post-fabrication refill processes, use snap-through technique calls only initial activation step without need constantly applied additional process st...

In the last decade Micromechanical components for communication applications has been fabricated via IC-compatible MEMS technologies. In fact, its most important impact is not at the component level, but rather at the system level, by offering alternative transceiver architectures that reduce power consumption and enhance performance. In this paper a mixer-filter for AM frequency receiver with ...

Abstract Optimization of the suspension micromechanical accelerometer, which is a part an angular velocity measurement unit, was considered. This problem faced because need to improve design existing device meet new technical requirements. Shock loads up 1 000 g exceed ultimate for accelerometers by several orders magnitude. During study, it turned out that unit shell works as resonator, so sho...

The mechanism which real flying insects use to detect body rotation has been simulated. The results show that an angular rate sensor can be made based on such a biological mechanism. Two types of biomimetic gyroscopes have been constructed using foils of stainless steel. The first device is connected directly to a compliant cantilever. The second device is placed on a mechanically amplifying fo...

Micromechanical resonators with fundamental vibrational mode frequencies in the range 10MHz–1GHz can now be fabricated [1, 2]. Applications include fast, ultrasensitive force and displacement detectors [3], electrometers [4, 5], and radio frequency signal processors [6]. However, the advances in the development of micromechanical devices also raise the fundamental question of whether mechanical...

This paper deals with the design and fabrication of a quartz-crystal resonator used in a thickness-monitor unit, measuring film thickness in a film-depositing system. A purpose-grown quartz crystal is cut to form the desired wafer. Two gold electrodes are deposited on both surfaces of the wafer to provide electrical contacts. The resonance frequency of the resonator, at room temperature, and th...