The interdigital ~ID! cantilever with two sets of interleaving fingers is an alternative to the conventional cantilever used in the atomic force microscope ~AFM!. In this paper we present a detailed analysis of the interdigital cantilever and its use as a sensor for the AFM. In this study, we combine finite element analysis with diffraction theory to simulate the mechanically induced optical re...

Based on the optical deflection method, the resonant characteristics of a microcantilever under various pressure have been observed at room temperature to understand the pressure-dependent dissipation effect. Especially, the quality factor of the cantilever has been measured for up to fourth harmonic mode of cantilever resonance as a function of pressure between 0.1 and 1000 Torr. By considerin...

We use a soft templating approach in combination with evaporation induced self-assembly to prepare mesoporous films containing cylindrical pores with elliptical cross-section on an ordered pore lattice. The film is deposited on silicon-based commercial atomic force microscope (AFM) cantilevers using dip coating. This bilayer cantilever is mounted in a humidity controlled AFM, and its deflection...

This study presents the deflection, resonant frequency and stress results of rectangular, triangular, and step profile microcantilevers subject to surface stress. These cantilevers can be used as the sensing element in microcantilever biosensors. To increase the overall sensitivity of microcantilever biosensors, both the deflection and the resonant frequency of the cantilever should be increase...

This paper reports on the fabrication and characterisation of self-actuating, and selfsensing cantilever arrays for large-scale parallel surface scanning. Each cantilever is integrated with a sharp silicon tip, a thermal-driven bimorph actuator, and a piezoresistive deflection sensor. Thus, the tip to the sample distance can be controlled individually for each cantilever. A radius of the tips b...

We present a multipurpose nanomechanical force probe that combines a sideways-mounted elastic cantilever and an optical-lever detection module with automated micropipette manipulation. It allows us to apply and measure compression, stretching, adhesion, and dissociation forces in the horizontal direction while providing a "side view" of ongoing experiments. The integrated micropipette setup fac...

An interferometric method is implemented in order to accurately assess the thermal fluctuations of a micro-cantilever sensor in liquid environments. The power spectrum density (PSD) of thermal fluctuations together with Sader's model of the cantilever allow for the indirect measurement of the liquid viscosity with good accuracy. The good quality of the deflection signal and the characteristic l...

Theoretical models for the frequency response of a cantilever beam immersed in a viscous fluid commonly assume that the fluid is unbounded. Experimental measurements show, however, that proximity to a surface can significantly affect the frequency response of a cantilever beam. In this article, we rigorously calculate the effect of a nearby surface on the frequency response of a cantilever beam...

The present study investigates the effects of thermal conduction and convection on self-heating temperatures and bimetallic deflections produced in doped microcantilever sensors. These cantilevers are commonly used as sensors and actuators in microsystems. The cantilever is a monolith, multi-layer structure with a thin U-shaped element inside. The cantilever substrate is made of silicon and sil...

In this investigation an elastic stress analysis is carried out a woven steel fiber reinforced thermoplastic cantilever beam loaded uniformly at the upper surface. The composite beam material consists of low density polyethylene as a thermoplastic (LDFE, f.2.12) and woven steel fibers. Granules of the polyethylene are put into the moulds and they are heated up to 160°C by using electrical resis...