نتایج جستجو برای: atmospheric pressure chemical vapor deposition

تعداد نتایج: 919037  

2012
Ruitao Lv Qing Li Andrés R. Botello-Méndez Takuya Hayashi Bei Wang Ayse Berkdemir Qingzhen Hao Ana Laura Elías Rodolfo Cruz-Silva Humberto R. Gutiérrez Yoong Ahm Kim Hiroyuki Muramatsu Jun Zhu Morinobu Endo Humberto Terrones Jean-Christophe Charlier Minghu Pan Mauricio Terrones

Graphene is a two-dimensional network in which sp(2)-hybridized carbon atoms are arranged in two different triangular sub-lattices (A and B). By incorporating nitrogen atoms into graphene, its physico-chemical properties could be significantly altered depending on the doping configuration within the sub-lattices. Here, we describe the synthesis of large-area, highly-crystalline monolayer N-dope...

This paper is an attempt to synthesize nanostructured tantalum films on medical grade AISI 316L stainless steel (SS) using pulsed DC plasma assisted chemical vapor deposition (PACVD). The impact of duty cycle (17-33%) and total pressure (3-10 torr) were studied using field emission scanning electron microscopy (FESEM), grazing incidence x-ray diffraction (GIXRD), nuclear reaction analysis (NRA)...

2001
Ruihua Cheng C. N. Borca P. A. Dowben Y. U. Idzerda

We have used laser-initiated chemical vapor deposition to grow the chromium oxide thin films through the oxidation of Cr~CO!6 in an oxygen environment. While both Cr2O3 and CrO2 are present in the film, the relative weight of each phase depends on the oxygen partial pressure. The Curie temperature of the film increases and approaches the bulk TC of CrO2 ~397 K! as the partial oxygen pressure is...

2016
Subrina Rafique Lu Han Marko J. Tadjer Jaime A. Freitas Nadeemullah A. Mahadik Hongping Zhao Jaime A. Freitas

Journal: :Microelectronics Reliability 2005
E. Sleeckx Marc Schaekers X. Shi E. Kunnen B. Degroote M. Jurczak M. de Potter de ten Broeck E. Augendre

This paper gives some insights in the applications where PECVD nitrides can be introduced to replace the LPCVD layers and how the process parameters need to be varied to obtain the desired properties. Film properties like stress, hydrogen content, wet etch rate and deposition rate are reported. The nitrides are optimized for specific applications and examples on the influence of nitride propert...

نمودار تعداد نتایج جستجو در هر سال

با کلیک روی نمودار نتایج را به سال انتشار فیلتر کنید