We studied the effect of dopants (Al, Ti, Zr) on the thermal stability of iron-nitride thin films prepared using a dc magnetron sputtering technique. Structure and magnetic characterization of deposited samples reveal that the thermal stability together with soft magnetic properties of iron-nitride thin films get significantly improved with doping. To understand the observed results, detailed F...

In this work, the deposition of titanium nitride (TiN) thin film using direct current (DC) sputtering technique and its application as diffusion barriers against copper interconnect was presented. The deposited analyzed by X-ray diffraction (XRD), field-emission scanning electron microscopy (FESEM), photoelectron spectroscopy (XPS) techniques. XRD patterns showed face-centered cubic (FCC) struc...

Dynamic ion-recoil mixing of near-film-surface atomic layers is commonly used to increase the metastable solubility limit xmax in otherwise immiscible thin film systems during physical vapor deposition. Recently, Al subplantation achieved by irradiating film growth surface with Al+ metalion flux was shown to result in an unprecedented xmax for VAlN, far above values obtained with gas ion irradi...

This work presents the development of an Electrolyte-Insulator-Semiconductor (EIS) device with a built-in reference electrode to detect phosphate in wastewater. The idea developing this comes from need improve use water processed by effluent treatment plant. After process, fraction can be used as wastewater, cannot consumed, however it for other purposes including cleaning public spaces, such s...

Titanium thin films were deposited by dc magnetron sputtering. The GLancing Angle Deposition (GLAD) method was implemented to prepare two series of titanium films: perpendicular and oriented columnar structures. The first one was obtained with a conventional incidence angle of the sputtered particles ( = 0°), whereas the second one used a grazing incidence angle = 85°. Afterwards, films were an...

Composite titanium carbonitride (TiCN) thin films deposited on AZ31 by DC/RF magnetron sputtering were vacuum annealed at different temperatures. Vacuum annealing yields the following on the structure and properties of the films: the grain grows and the roughness increases with an increase of annealing temperature, the structure changes from polycrystalline to single crystal, and the distributi...

A novel, miniaturized, high-efficiency photocatalytic cell, able to work in dynamic conditions, has been designed and validated in this study. Microfluidic channels were molded out of polydimethylsiloxane (PDMS) by means of standard soft lithography techniques, so as to work as photocatalytic cells, where the coupling of anatase titanium dioxide thin films and platinum electrodes, allows an ele...

two potassium oxalate doped tio2 samples, designated as k1-tio2 and k2-tio2, were synthesized by the base-catalyzed sol-gel process. these samples were impregnated into rubber sheets. two commercial tio2 samples, anatase and degussa p25, were used as reference materials with which the synthesized samples were to be compared. anatase and p25 were also impregnated into rubber sheets and designate...