نتایج جستجو برای: su 8
تعداد نتایج: 738667 فیلتر نتایج به سال:
Microporous structures are central to many fields of science and engineering, but many of these systems are complex with little or no symmetry and are difficult to fabricate. We applied two-photon polymerization (2PP) and femtosecond laser direct-writing techniques to fabricate broadarea large-format 3D microporous structures (450 μm × 450 μm × 40 μm) in the epoxy-based photoresist SU-8. The ap...
This paper describes the development of a polyimide/SU-8 catheter-tip MEMS gauge pressure sensor. Finite element analysis was used to investigate critical parameters, impacting on the device design and sensing characteristics. The sensing element of the device was fabricated by polyimide-based micromachining on a flexible membrane, using embedded thin-film metallic wires as piezoresistive eleme...
The fabrication of capped microstructures such as channels or cavities typically involves multiple production steps. In this work we demonstrate a fabrication procedure that enables the generation of capped monolithic microstructures of arbitrary geometry in one single exposure step. The presented method also enables the embedment of metal self-aligned surfaces for use as electrodes or mirrors....
We report a simple and low-cost method to fabricate SU-8-based polymer waveguide devices. The influence of hard-baking temperature on SU-8 polymer treated with or without UV radiation was investigated in detail. Based on these properties, the straight type, Y branch type, MarchZehnder (M-Z) type and 1 × 4 splitter waveguides were successfully fabricated. And a polymeric thermal-optic (TO) switc...
The generation and sensation of mechanical force plays a role in many dynamic biological processes, including touch sensation. This paper presents a two-axis micro strain gauge force sensor constructed from multiple layers of SU-8 and metal on quartz substrates. The sensor was designed to meet requirements for measuring tactile sensitivity and interaction forces exerted during locomotion by sma...
A high quality UV-lithographic process for making high aspect ratio micro reciprocating engine parts on ultra-thick SU8 photoresist CO2 is described. The research work is part of an on-going microengine research project at the University of Birmingham. The project aims to develop a compact power plant for driving MEMS devices and replacing batteries. The novelty of engine design is that the eng...
Abstract UV LIGA involves the exposure of SU-8 negative resist, using a UV mask aligner, to produce high aspect ratio pillars or microchannels as part of the manufacturing process for microsystems. This has been made possible by the widespread use of a UV sensitive resist SU-8. Many papers have been written on the Fresnel diffraction theory of exposure, some key properties of SU-8 and prototype...
SU-8 is a technologically important photoresist used extensively for thefabrication of microfluidics and MEMS, allowing high aspect ratio structures to beproduced. In this work we report the use of SU-8 as a Love wave sensor guiding layerwhich allows the possibility of integrating a guiding layer with flow cell during fabrication.Devices were fabricated on ST-cut quartz substrates with a single...
In this work, three-dimensional 3D SU-8 microand nanostructures were fabricated using a reversal UV imprint process at low temperature and low pressure. The SU-8 polymer was coated on a patterned glass mold and then transferred onto various substrates by reversal UV imprint at a typical temperature of 50 °C, pressure of 1 MPa, and UV exposure of 1 s. The lower temperature and pressure used comp...
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