Suspended microchannel resonators SMRs are an innovative approach to fluid-based microelectromechanical mass sensing that circumvents complete immersion of the sensor. By embedding the fluidics within the device itself, vacuum-based operation of the resonator becomes possible. This enables frequency shift-based mass detection with high quality factors, and hence sensitivity comparable to vacuum...

The quality factor of a mechanical resonator is an important figure of merit for various sensing applications and for observing quantum behavior. Here, we demonstrate a technique to push the quality factor of a micromechanical resonator beyond conventional material and fabrication limits by using an optical field to stiffen or trap a particular motional mode. Optical forces increase the oscilla...

A capacitive coupling between mechanical resonator and a microwave cavity enables readout and manipulation of the vibrations. We present a set-up to carry out such experiments with aluminum membranes fabricated as stamps and transferred in place with micromanipulation. The membrane is held in place by van der Waals forces, and is supported by three microscopic points. We measure the lowest mech...

in this paper, using annular resonator we have designed an adding and dropping filter light based ontwo-dimensional photonic crystals. the shape of ring resonator filter adding and dropping that wehave proposed is race track. this filter has a hexagonal lattice structure of silicon bars withrefractive index 3/46 that is located in the context of air with refractive index 1. transmissionefficien...

Parametric amplification, resulting from intentionally varying a parameter in a resonator at twice its resonant frequency, has been successfully employed to increase the sensitivity of many micro- and nano-scale sensors. Here, we introduce the concept of self-induced parametric amplification, which arises naturally from nonlinear elastic coupling between the degenerate vibration modes in a micr...

High Quality Factor Lamb Wave Resonators by Jie Zou Master of Science in Electrical Engineering and Computer Sciences University of California, Berkeley Professor Albert P. Pisano, Chair The small-in-size and CMOS compatible micro-electromechanical system (MEMS) resonators are likely to be the driving core of a new generation of devices such as radio frequency (RF) filters and timing references...

Using a coupled parametric resonator array for generating and propagating topological soliton in its rotating-frame phase space is theoretically numerically investigated. In an analogy with the well-known ${\ensuremath{\phi}}^{4}$ model, existence of topologically protected, as boundary two different domains oscillation. Numerical simulation indicates that propagation can be triggered by switch...

In this work we consider several nonlinearity-based and/or noise-related phenomena that have been recently observed in micro-electromechanical vibratory systems. The main goals are to closely examine these phenomena, develop an understanding of their underlying physics, derive techniques for characterizing parameters in relevant mathematical models, and determine ways to improve the performance...

Biomimetic Sensor Modeling and Simulations for Flight Control of a Micromechanical Flying Insect