Microcantilevers are the basic MEMS devices, which can be used as sensors, actuators and electronics can be easily built into them. The detection principle of microcantilever sensors is based on the measurement of change in cantilever deflection or change in its resonance frequency. The objective of this work is to explore the analogies between mechanical and electrical equivalent of microcanti...

Plasmonic lithography with a contact probe records nano-meter scale features and has high-throughput owing to its capability to scan in contact mode. The probe is commonly based on a micrometer-scale cantilever, which leads to the tip-positioning problem due to force-deflection that induces lateral tip displacement. We propose a geometrically modified probe to achieve high positioning accuracy....

INTRODUCTION This paper describes the design and some initial evaluation of a prototype instrument for measuring roundness profiles of axially symmetric micro components with diameters below 500 μm. The instrument will measure form error in micro-scale cutting tools used for micro machining, small-hole metrology probes, and other high aspect ratio micro structures. The instrument will operate o...