The Error-Reduction algorithm is tested to reconstruct the exact 2D-shape of irregular rough particles from their experimental interferometric images. are “programmable” generated with a digital micromirror device. method first applied centrosymmetric particles, and then non-centrosymmetric where twin image problem brings additional difficulty.

Short (40-200 μs) single focused CO(2) laser pulses of energy ≳100 μJ were used to fabricate high quality concave micromirror templates on silica and fluoride glass. The ablated features have diameters of ≈20-100 μm and average root-mean-square (RMS) surface microroughness near their center of less than 0.2 nm. Temporally monitoring the fabrication process revealed that it proceeds on a time sc...

The DMD (Digital Micromirror Device) has become an integral part of the instrumentation for many applications. Prior characterization of this device has been focused on its use in DLP (TI Digital Light Processing) projector applications where a collimated wavefront impinges on the DMD. The results of such investigations are not applicable to using DMDs at the focal plane of an optical system wh...

Silicon deformable mirrors have the potential to modulate spatial and temporal features of an optical wavefront. This capability is critical for systems in which aberrations affect optical beam quality, including many applications in laser communication, medical imaging, astronomy, and target tracking. The main goal of the work presented here was to design, build, and test a 1024 actuator wavef...

This paper presents a time-multiplexed plasma-etching method for high numerical aperture paraboloidal micromirrors. By designing the appropriate opening and spacing of etching windows, one can fabricate micromirror arrays with varying focal lengths within one batch. INTRODUCTION Curved micromirrors, including various existing deformable micromirrors, e.g. [1-3], have many applications in micro-...

This paper deals with computer aided generation of reduced-order models for fast static and dynamic simulations of micro electromechanical systems. Following previous work, we present improved methods to reduce the computational effort of parameter extraction techniques, to consider multiple electrodes and the extension of analysing capabilities. A micromirror example will be used to demonstrat...

We present an in-detail description of the design, simulation, fabrication, and packaging of a linear micromirror array specifically designed for temporal pulse shaping of ultrashort laser pulses. The innovative features of this device include a novel comb-drive actuator allowing both piston and tilt motion for phase- and amplitude-shaping, and an X-shaped laterally reinforced spring preventing...