Over the past few years, microelectromechanical system (MEMS) based on-chip resonators have shown significant potential for sensing and high frequency signal processing applications. This is due to their excellent features like small size, large frequency-quality factor product, low power consumption, low cost batch fabrication, and integrability with CMOS IC technology. Radio frequency communi...

The strength of optomechanical interactions in a cavity optomechanical system can be quantified by a vacuum coupling rate g0 analogous to cavity quantum electrodynamics. This single figure of merit removes the ambiguity in the frequently quoted coupling parameter defining the frequency shift for a given mechanical displacement, and the effective mass of the mechanical mode. Here we demonstrate ...

A 550 kHz CMOS micromechanical bandpass filter, is designed using a parameterized cell library, "NODAS," for schematic representation and behavioral HDL simulation. The filter employs a unique resonator and coupling spring structure implemented in a CMOS-MEMS technology. As an alternative design method, an equivalent SPICE model is derived for the filter. Frequency response around the filter pa...

Quantum information can be stored in micromechanical resonators, encoded as quanta of vibration known as phonons. The vibrational motion is then restricted to the stationary eigenmodes of the resonator, which thus serves as local storage for phonons. In contrast, we couple propagating phonons to an artificial atom in the quantum regime and reproduce findings from quantum optics, with sound taki...

In this paper, we describe a new approach for fabrication of micromechanical resonators for radio-frequency communication applications. The proposed process provides ultra-narrow lateral gaps using lithographically-defined sacrificial Ge blades. By using Germanium as a sacrificial material, we eliminate the need for HF etching to release mechanical structures and thereby simplify the integratio...

The rapid layout synthesis of microresonators from high-level engineering specifications is demonstrated. Functional parameters such as resonant frequency, quality factor, and displacement amplitude at resonance are satisfied while simultaneously minimizing a user-specified objective function. A synthesis tool implementing the optimization-based formulation can be used to explore micromechanica...

Micromechanical resonators are promising replacements for quartz crystals for timing and frequency references owing to potential for compactness, integrability with CMOS fabrication processes, low cost, and low power consumption. To be used in high performance reference application, resonators should obtain a high quality factor. The limit of the quality factor achieved by a resonator is set by...