We present a new type of cryogenic local velocity probe that operates in liquid helium (1 K < T < 4.2 K) and achieves a spatial resolution of ≈ 0.1 mm. The operating principle is based on the deflection of a micro-machined silicon cantilever which reflects the local fluid velocity. Deflection is probed using a superconducting niobium micro-resonator sputtered on the sensor and used as a strain ...

0167-9317/$ see front matter 2011 Elsevier B.V. A doi:10.1016/j.mee.2011.08.004 ⇑ Corresponding author. Tel.: +1 517 432 2130. E-mail address: [email protected] (N. Sepúlved This paper reports a multiple-state micro-mechanical memory. The tip displacements of a 350 lm long VO2-coated micro-mechanical silicon cantilever were programmed to absolute displacements ranging from 19 to 7 m. Ten non-...

During a micromanipulation, it is important to have the same performances whatever the manipulated object is. We present in this paper the control of the force applied to flexible and rigid micro-objects by a piezoelectric cantilever. First, the voltage-force transfer function is modeled. The hysteresis and creep phenomena are taken into account. The reliance of the model on the characteristics...

In this paper we present a mathematical model for the dynamics of an electrostatically actuated micro-cantilever. For the common case of cantilevers excited by a periodic voltage, we show that the underlying linearized dynamics are those of a periodic system described by a Mathieu equation. We present experimental results that confirm the validity of the model, and in particular illustrate that...

Abstract: In recent years, MEMS/NEMS (Micro-/Nano Electro Mechanical Systems) sensors have attracted tremendous interest among researchers due to their low cost, quick response time, as well as high sensitivity and selectivity. In this paper, an ultra sensitive acetone sensor based on carbon nanotube (CNT) structure is proposed. In this device, a carbon nanotube is anchored to a substrate in on...

The spring constant of an atomic force microscope cantilever is often needed for quantitative measurements. The calibration method of Sader et al. [Rev. Sci. Instrum. 70, 3967 (1999)] for a rectangular cantilever requires measurement of the resonant frequency and quality factor in fluid (typically air), and knowledge of its plan view dimensions. This intrinsically uses the hydrodynamic function...

The volume required for the rheological characterization of fluids can beminimized by using micromechanical cantilevers as viscosity sensors. Here, a simplemeasurement tool for the characterization of sugar solutions is proposed. The sensorconsists of a micromechanical cantilever as used in an atomic force microscopy which isintegrated into a closed fluid handling system. Fluid properties are d...

--MEMS based mass sensors are being designed to identify the small amounts of materials especially for monitoring the food supply. The Fabrication of MEMS includes deposition of material layers, pattering by photolithography and etching to produce the required shapes, consequently leading to time taking and expensive method. In order to reduce the working time of sensor to market a Finite eleme...

We demonstrate the use of micromechanical cantilever arrays for selective immobilization and fast quantitative detection of vital fungal spores. Micro-fabricated uncoated as well as gold-coated silicon cantilevers were functionalized with concanavalin A, fibronectin or immunoglobulin G. In our experiments two major morphological fungal forms were used--the mycelial form Aspergillus niger and th...

Abstract: In this study, a new analytical model is developed for an electrostatic Microelectromechanical System (MEMS) cantilever actuator to establish a relation between the displacement of its tip and the applied voltage. The proposed model defines the micro-cantilever as a rigid beam supported by a hinge at the fixed-end with a spring point force balancing the structure. The approach of the ...