The piezoelectric generation of perovskite BaTiO3 thin films on a flexible substrate has been applied to convert mechanical energy to electrical energy for the first time. Ferroelectric BaTiO3 thin films were deposited by radio frequency magnetron sputtering on a Pt/Ti/SiO2/(100) Si substrate and poled under an electric field of 100 kV/cm. The metal-insulator (BaTiO3)-metal-structured ribbons w...

A highly efficient and reproducible cleaning procedure of piezoelectric substrates is essential in surface acoustic waves (SAW) technology to fabricate high-quality SAW devices, especially for new applications such SAW sensors wherein new materials for piezoelectric substrates and interdigital transducers are used. Therefore, the development and critical evaluation of cleaning procedures for ea...

This paper reports on design, fabrication and experimental testing of a new class of two-port stacked piezoelectric aluminum nitride contour-mode micromechanical resonators that can be used for RF filtering and timing applications. This novel design consists of two layers of thin film AlN stacked on top of each other and excited in contour mode shapes using the d31 piezoelectric coefficient. Ma...

A new type of Acoustic Emission sensor using a thin film piezoelectric material (sputtered ZnO) was developed for measuring head-disk interaction in a rigid magnetic disk system. The sensor is mounted on a Si slider (length : 3 mm) and was fabricated using micro-machining techniques in our on-going efforts to downsize sliders. Some fundamental tests of the sensor were conducted : sensitivity an...

Articles you may be interested in Comprehensive characterization of surface acoustic wave resonators using relaxor based ferroelectric single crystals Appl. Single ferroelectric domain nucleation and growth monitored by high speed piezoforce microscopy High-frequency surface acoustic wave devices based on LiNbO 3 diamond multilayered structure Appl. High-frequency surface acoustic wave device b...

We demonstrate electrical tuning of phase mismatch in silicon wavelength converters. Active control of birefringence induced by a thin-film piezoelectric transducer integrated on top of the waveguides is used for dispersion engineering. The technology provides a solution for compensating the phase mismatch caused by fabrication errors in integrated waveguides. It also offers a mean to dynamical...

This paper reports lead zirconate tit silicon electromechanical resonators wit terminated, performances for RF appl 2.14 dB insertion loss is demonstrat extensional, PZT-on-2-μm-silicon 15 M 22 dB return loss and maximum unload QUL,max, of ~540 in air resulted for this r performances with a QUL,max of demonstrated with a PZT fabricated device. The competing effects of de resistance and increase...

In this paper, a polyvinylidene fluoride (PVDF) piezoelectric transducer was developed to detect laser-induced surface acoustic waves in a SiO(2)-thin film-Si-substrate structure. In order to solve the problems related to, firstly, the position of the probe, and secondly, the fact that signals at different points cannot be detected simultaneously during the detection process, a four-quadrant su...

We have studied the stability of domains and domain walls in multiferroic BiFeO3 thin films using a combination of piezoelectric force microscopy and phase-field simulations. We have discovered that a film-substrate misfit strain may result in a drastically different thermodynamic stability of two parallel domain walls with the same orientation. A fundamental understanding of the underlying phy...

This paper describes a fully integrated acoustic sensor that combines high sensitivity, wide frequency range and low cost of batch processed miniaturized silicon components. A sputtered piezoelectric ZnO layer transforms the mechanical deflection of a thin-etched-Si diaphragm into a piezoelectric charge. ZnO has transparent and conductive properties, which makes it attractive for a variety of s...