A novel fast tool servo driven by piezoelectric actuator for precision diamond turning is designed in this paper. To overcome the inherent hysteresis and drift nonlinearity effect of the piezoelectric actuator, a closed-loop control system is established using strain gauge integrated in the actuator for position feedback, which has compact structure and can avoid interference in the machining. ...

This paper reports on the first demonstration of an ultra-high resolution (~371 pW/Hz1/2) uncooled infrared (IR) detector based on a high frequency (136 MHz) Aluminum Nitride (AlN) piezoelectric resonant micro-plate completely released from the substrate and supported by two nanoscale Platinum (Pt) anchors. For the first time, fully metallic tethers were employed to support the freestanding vib...

A new approach to compensate the strong hysteresis nonlinearity in piezoelectric materials is proposed. Based on the inverse multiplicative scheme, the approach avoids models inversion as employed in existing works. The compensator is therefore simple to implement and does not require additional computation as soon as the direct model is available. The proposed compensation technique is valuabl...

In this study, electro-thermo-mechanical nonlinear vibration and instability of embedded piezoelectric micro-tube is carried out based on nonlocal theory and nonlinear Donnell's shell model. The smart micro-tube made of Poly-vinylidene fluoride (PVDF) is conveying an isentropic, incompressible fluid. The detailed parametric study is conducted, focusing on the remarkable effects of mean flow vel...

The work carried out in this article essentially relates to the application of a synergetic control piezoelectric positioning mechanism or actuator (PEA). A LuGre model has been followed, capturing most physical phenomena, order be able follow realistic and representative possible. From model, which is then identified by particle swarm optimization (PSO), we apply technique, very efficient meth...

In this study, non-stoichiometry lead-free piezoelectric ceramic Li0.058(K0.48Na0.535)0.966(Nb0.9Ta0.1)O3 (LKNNT) thick films were deposited on Pt/Ti/Si substrates using spin-coating method technology to form a LKNNT/Pt/Ti/Si structure of the micro-pressure films. Additionally, influence crystalline properties, surface microstructure images, and mechanical properties observed, analyzed, calcula...

The output voltage is a key parameter to quantify the performance of piezoelectric devices, particularly for energy harvesters and sensors. Our recent work (Su et al., 2015) reported that the measured output voltage depends on the inner resistance of voltmeter used. It is contrary to the established concept that the measured results should be independent of the instruments used. Similar measure...