In the last decade we have witnessed exciting technological advances in the fabrication and control of microelectromechanical and nanoelectromechanical systems (MEMS&NEMS) [16, 19, 26, 54, 55]. Such systems are being developed for a host of nanotechnological applications, such as highly sensitive mass [25, 34, 67], spin [56], and charge detectors [17, 18], as well as for basic research in the m...

OF DOCTORAL DISSERTATION HELSINKI UNIVERSITY OF TECHNOLOGY P.O. BOX 1000, FI-02015 TKK http://www.tkk.fi Author Mika Petteri Koskenvuori Name of the dissertation Microelectromechanical resonators for frequency reference and frequency conversion applications Manuscript submitted 07.12.2007 Manuscript revised 03.03.2008 Date of the defence 04.04.2008 Monograph Article dissertation (summary + orig...

The nonlinear dynamical behavior of a micromechanical resonator acting as one of the mirrors in an optical resonance cavity is investigated. The mechanical motion is coupled to the optical power circulating inside the cavity both directly through the radiation pressure and indirectly through heating that gives rise to a frequency shift in the mechanical resonance and to thermal deformation. The...