Physical Properties of Reactively Sputter-Deposited C-N Thin Films

Sputter-deposited Sma Thin Films: Properties and Applications

Shape memory alloy (SMA) thin films formed by sputter deposition have attracted considerable attention in the last decade. Current intensive research demonstrated that thin films' unique fine microstructure is responsible for superior shape memory characteristics in films, compared to that of bulk materials. Simultaneously, much effort has been taken in the development and fabrication of microd...

Structure and properties of sputter-deposited Al-Sn-N thin films

Coatings consisting of Al, Sn and N have been deposited using co-sputtering from Al and Sn targets in a reactive atmosphere containing N2. AlN was used as starting point, and the Sn content was gradually increased through higher cathode power on the Sn target, resulting in coatings with Sn-contents between 0 and 24 at.%. The coatings were analysed using X-ray diffraction (XRD), X-ray photoelect...

Growth, structure and stability of sputter-deposited MoS2 thin films

Molybdenum disulphide (MoS2) thin films have received increasing interest as device-active layers in low-dimensional electronics and also as novel catalysts in electrochemical processes such as the hydrogen evolution reaction (HER) in electrochemical water splitting. For both types of applications, industrially scalable fabrication methods with good control over the MoS2 film properties are cru...

Metal-to-insulator transition in sputter deposited 3NiÕAl thin films

The influence of target stoichiometry on the surface properties of sputter deposited calcium phosphate thin films

Article history: A range of calcium phosph Received 9 July 2008 Accepted in revised form 5 August 2008 Available online 13 August 2008

Effects of Cu on the microstructural and mechanical properties of sputter deposited Ni-Ti thin films

The microstructure of sputter deposited Ti-rich Ni-Ti thin films doped with Cu in the range 020.4 at.% and annealed for 1 h at 500 and 600°C has been investigated and correlated with the mechanical properties of the films measured by depth-sensing nanoindentation. X-ray diffraction analysis showed the microstructural evolution of Ni-Ti thin films when doped with Cu and annealed at different tem...