Fractional Order Control of Micro Electro-Mechanical Systems

fractional order control of micro electro-mechanical systems

this paper addresses the problem of the fractional sliding mode control (fsmc) for a mems optical switch. the proposed scheme utilizes a fractional sliding surface to describe dynamic behavior of the system in the sliding mode stage. after a comparison with the classical integer-order counterpart, it is seen that the control system with the proposed sliding surface displays better transient per...

Micro - Electro - Mechanical - Systems ( Mems )

Robust Position Control of Electro-mechanical Systems

In this work, the robust position control scheme is proposed for the electro-mechanical system using the disturbance observer and backstepping control method. To the external unknown load of the electro-mechanical system, the nonlinear disturbance observer is given to estimate the external unknown load. Combining the output of the developed nonlinear disturbance observer with backstepping techn...

Finite Element Based Reduced Order Modeling of Micro Electro Mechanical Systems (MEMS)

The paper demonstrates reduced order modeling (ROM) of the strongly coupled system level dynamic analysis of micro electro mechanical systems (MEMS) by lumped finite elements (FE) and substructuring implemented in the ANSYS/Multiphysics program. Index terms Micro Electromechanical Systems (MEMS), Finite elements (FE), Coupled analysis, Reduced order modeling (ROM)

Internet Based Prototyping of Micro-Electro-Mechanical Systems

This paper details preliminary work investigating Internet-based simulation of microsystems. It is in no means exhaustive, and focuses on using mainstream, current web-based technology while highlighting anticipated future directions in relevant internet technology. It proposes a paradigm of automation that limits the information that needs to pass back and forth between a browser-based client ...