Effect of bias voltage on structural and mechanical characteristics of diamond-like carbon thin film applied by ion beam deposition

This study, investigates the effect of bias voltage on structural changes of diamond-like carbon thin film created by ion beam deposition is investigated. For this purpose, the bias voltage in the values of 0 V, -50 V, -100 V and -150 V on the AA5083 aluminum alloy was considered. Raman spectroscopy was used to evaluate structural. Influence of the bias voltage on the thickness and roughness of coatings by atomic force microscope (AFM) and field emission scanning electron microscope (FESEM) were investigates. Hardness and elastic modulus were measured by nanoindentation test. The results of Raman analysis showed the highest amount of sp3 bonds in the diamond-like carbon thin film at bias voltage of -50 Vs. results of AFM showed the lowest of surface roughness (10 nm) at bias voltage of -50 Vs. The hardness of diamond-like carbon thin film was 14.1 GPa at the bias voltage of -50 Vs.