Design of a Resonant Suspended Gate MOSFET with Retrograde Channel Doping
Authors
Abstract:
High Q frequency reference devices are essential components in many Integrated circuits. This paper will focus on the Resonant Suspended Gate (RSG) MOSFET. The gate in this structure has been designed to resonate at 38.4MHz. The MOSFET in this device has a retrograde channel to achieve high output current. For this purpose, abrupt retrograde channel and Gaussian retrograde channels have been investigated.
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Journal title
volume 6 issue 2
pages 77- 83
publication date 2010-06
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