An Investigation on Two Types of Crystalline Micro-diamond Film Coated Tools Lapping with Sapphire Wafer

Two types of micron-diamond films were prepared on YG6 substrate by hot filament chemical vapor deposition(HFCVD) method. Morphology and orientation of crystalline growth were evaluated by SEM and XRD. Diamond film coated tools and sapphire wafer’ surface before and after lapping experiment  were contrasted. The results indicated that a significant change in Raman spectrum of two types of micron-diamond film appeared after lapping. The two types of micron- diamond film’s graphitization were all obviously. The SMDF tool’s value of friction coefficient was larger than the FMDF’s.  The surface roughness of sapphire wafer lapped by FMDF was lower than by SMDF. Compared two kinds of micron diamond film, FMCD's  lapping effect was better.