Dynamic Modeling and Optimization of a Decoupled XY Flexure Parallel Micro-Manipulator
نویسندگان
چکیده
The architecture optimization of a newly designed flexure XY parallel micro-manipulator with both input and output decoupling is conducted in this paper. In view of the compliance of flexure hinges, the input stiffness model of the motion stage are established based upon the matrix method, and then the dynamic equation is derived through the Lagrangian approach, which is verified by the modal analysis performed via finite element analysis (FEA). With the goal of maximizing the natural frequency of the stage, the architecture optimization is carried out by the particle swarm optimization (PSO) along with the stiffness values of actuators and workspace size of the manipulator taken into account. Both the effectiveness of the optimization and the decoupling properties of the manipulator are validated by the FEA with ANSYS. The results are useful for the development of a new decoupled XY flexure parallel micro-manipulator for micro/nano scale manipulation.
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