Bottom-up approach to silicon nanoelectronics
نویسندگان
چکیده
This paper presents a brief review of our recent work investigating a novel bottom-up approach to realize silicon-based nanoelectronics. We discuss fabrication technique, electronic properties, and device applications of silicon nanodots as a building block for various nanoscale silicon devices. r 2006 Published by Elsevier Ltd.
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ورودعنوان ژورنال:
- Microelectronics Journal
دوره 39 شماره
صفحات -
تاریخ انتشار 2008