Design Optimization & Comparison of RF Power Sensors based on MEMS
نویسندگان
چکیده
The RF MEMS technology has a great potential to replace conventional switching techniques and it can offer highly miniature switches and sensors with superior RF performance. The main principle of a RF MEMS based power senor is based on sensing the attractive electrostatic force between the signal line and a free standing electrode that is suspended at a small distance from the signal line. Key objective of this project is to optimize the novel configurations of MEMS based RF power sensor, and to find a design with decreased reflection and insertion losses. The aim includes showcase of a comparison between two design configurations in terms of reflection and insertion losses and general performance. Theoretical and simulated results are presented for the proposed designs of the sensor.
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