Construction of a new C]H]O ternary diagram for diamond deposition from the vapor phase
نویسندگان
چکیده
A new C]H]O ternary diagram is presented based on radical species composition showing the regions for diamond deposition, non-diamond deposition, and no deposition from the vapor phase. This construction is based on the steady-state computations of gas-phase and gas-surface chemistry from the data points presented in the C]H]O ternary diagram based on feed gas Ž Ž . . composition by Bachmann et al. P.K. Bachmann, D. Leers, H. Lydtin. Diamond Relat. Mater. 1 1991 1 . The analysis of the computational results indicates that the radical species composition does distinguish the three regions and helps explain the contradicting experimental data points using non-typical gas mixtures. The analysis also shows that the revised diagram based on Ž . radical species composition works only when carbon monoxide CO is treated as a non-participating species. The effects of temperature, pressure and flow rates on this new ternary diagram are also detailed. Q 2000 Elsevier Science S.A. All rights
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