Alloying Kinetics in Contact Metallisation for CMOS
ثبت نشده
چکیده
Nickel silicides are widely used in making electrical contact to complementary metal-oxidesemiconductor (CMOS) devices in advanced integrated circuits. They have been the preferred contacting material since the 2006 “65 nm technology node”, partly because a self-aligned-silicide (“SALICIDE” [1]) process is available. However, their high temperature behaviour is complex and, crucially, improved by the presence of platinum.
منابع مشابه
CMOS compatible fabrication methods for submicron josephson junction qubits - Science, Measurement and Technology, IEE Proceedings-
The authors have developed two distinct processes for the fabrication of mesoscopic Josephson junction qubits that are compatible with conventional CMOS processing. These devices, based on superconducting Al/A1203/AI tunnel junctions, are fabricated by electron beam lithography using single-layer and multi-layer resists. The new single-layer resist process is found to have significant advantage...
متن کاملPerformance potential of low-defect density silicon thin-film solar cells obtained by electron beam evaporation and laser crystallisation
A few microns thick silicon films on glass coated with a dielectric intermediate layer can be crystallised by a single pass of a line-focused diode laser beam. Under favorable process conditions relatively large linear grains with low defect density are formed. Most grain boundaries are defect-free low-energy twin-boundaries. Boron-doped laser crystallised films are processed into solar cells b...
متن کاملHigh-transparency Ni/Au ohmic contact to p-type GaN
In this study, a very thin Ni/Au bilayer metal film was prepared by electron beam evaporation and thermal alloying to form ohmic contact on p-type GaN film. After thermal alloying, the current– voltage (I – V) characteristic of Ni/Au contact on p-type GaN film exhibited ohmic behavior. The Ni/Au contacts showed a specific contact resistance of 1.7310 V cm at an alloying temperature of 450 °C. I...
متن کاملSynthesis and thermal stability of nanocrystalline Mg-6Al-1Zn-1Si alloy prepared via mechanical alloying
Thermal stability and the kinetics of the grain growth of nano-crystalline Mg-6Al-1Zn-1Si alloy prepared via mechanical alloying (MA) were investigated. It started with elemental powders, using a variety of analytical techniques including differential scanning calorimetry (DSC), X-ray diffraction method (XRD), and scanning electron microscopy (SEM) coupled with energy dispersive spectrometry (E...
متن کاملKinetics of Propane Hydrate Formation in Agitated Reactor: A Mass Transfer Approach
Understanding the kinetics of gas hydrate formation is essential to model and predict the hydrate formation (or dissociation) process. In the present paper, we investigated the formation of pure propane gas hydrate as a former gas. In this regard, several experiments were conducted to measure the rate of hydrate formation under various pressures (410 to 510 kPa) and temperatures (274 K to 277 K...
متن کامل