A Modular Mems Accelerometer Concept
نویسندگان
چکیده
Presently, main applications can be found in the automotive market segment (e.g. front and side airbag sensors, ESP respectively chassis stabilization, active suspension, roll over detection). However, low-g sensors enter also new application areas like inclinometry and vibration sensing for instance for anti-theft devices or activity monitoring for pacemaker control. Like in the microelectronics RAM-market the 50-g airbag sensor market has been ruined by a prestigious price war. Presently the low-g sensor market, which partially covers also the Inertial Measurement Module (IMM) market is gaining weight and speed.
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