Oxygen-ion implanted silicon microring resonator for high-speed all-optical switching
نویسندگان
چکیده
Ultrafast all-optical switching is demonstrated in an oxygen-ion implanted silicon-oninsulator microring resonator. The spectral response of the device is rapidly modulated via femtosecond optical excitation and subsequent recombination of charge carriers at artificially introduced ultrafast recombination centers. At an implantation dose of 1 × 1012 cm−2 the carrier lifetime is reduced to 55 ps which facilitates optical switching of signal light in the 1.55 μm wavelength range at modulation speeds larger
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