Refractive and diffractive properties of planar micro-optical elements.

The refractive and the diffractive properties of planar micro-optical elements are investigated. The transition between purely refractive and purely diffractive planar microlenses is numerically simulated for the example of differently designed phase-matched Fresnel elements. Results obtained from numerical simulations and experiments show that the refractive and diffractive types exhibit a distinctly different behavior in the presence of small fabrication errors or wavelength deviations. Based on these results, design rules for various applications, including low- and high-numerical-aperture lenses and hybrid refractive-diffractive elements, are derived. For a high-numerical-aperture (ƒ /# = 1.0) lens the experimental characterization of the irradiance distribution in the image space is presented and shown to agree well with theoretical predictions.