Trench Etched Resonant Pressure Sensor: TERPS
نویسندگان
چکیده
INTRODUCTION High precision pressure sensors based on resonating techniques have been manufactured for many years but use large transducer components and often have unwieldy media isolation techniques. This paper presents a MEMS Resonant Pressure Transducer (RPT) that is produced using a flexible fabrication route to allow pressure ranges from 1bar to 700bar in fully oil isolated hermetic packages without compromising sensor performance. The key aspects of the fabrication process and sensor design that make this possible are presented. Data showing long-term stability of better than 100ppm drift per year are presented. This paper discusses a new silicon based transducer design that can be packaged for use in a harsh environment in a small form factor.
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