Test Impact on the Overall Die-to-Wafer 3D Stacked IC Cost

One of the key challenges in 3D StackedICs (3D-SIC) is to guarantee high product quality at minimal cost. Quality is mostly determined by the applied tests and cost trade-offs. Testing 3D-SICs is very challenging due to several additional test moments for the mid-bond stacks, i.e., partially created stacks. The key question that this paper answers is what is the best test flow to be used in order to optimize the overall cost while realizing the required quality? We first present a framework covering different test flows for 3D Die-to-Wafer (D2W) stacked ICs. Thereafter, we present a cost model that allows us to evaluate these test flows. The impact of different test flows on the overall 3D-SIC cost for several die yields and stack sizes are investigated; a breakdown of the cost into test, manufacturing and packaging cost is also provided. Our simulation results show that both the test cost and the overall cost in D2W stacking strongly depends on the selected test flow; test flows with pre-bond and Responsible Editor: Y. Zorian M. Taouil (B) · S. Hamdioui · K. Beenakker Faculty of EE, Mathematic and CS, Delft University of Technology, Mekelweg 4, 2628 CD Delft, The Netherlands e-mail: [email protected] S. Hamdioui e-mail: [email protected] K. Beenakker e-mail: [email protected] E. J. Marinissen IMEC vzw, 3D Integration Program, Kapeldreef 75, 3001 Leuven, Belgium e-mail: [email protected] mid-bond stacking tests (performed during the stacking process) show a higher test cost share, but significantly reduce the overall 3D-SIC cost.