Direct Deposition of CMOS-compatible Sensor Films by Flame Spray Pyrolysis
نویسندگان
چکیده
A rapid, wafer-level, dry process for in-situ synthesis, deposition of stable nanostructured, porous metal-oxide films for gas sensors is presented. Lace-like, nanostructured films of pure SnO2 featuring high porosity (98%) are selfassembled on a target substrate by flame spray pyrolysis (FSP). The nanoparticles are mainly polyhedral and monocrystalline with a grain size of 8.7 nm and crystal size of 11.8 nm. The sensor performance has been assessed for CO so short response and recovery time were achieved.
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