Floating Body and Hot Carrier Effects in Ultra-Thin Film SOI MOSFETs

نویسندگان

  • S.-H. Renn
  • C. Raynaud
  • F. Balestra
چکیده

Floating body and hot carrier effects are thoroughly investigated in deep submicron Nand Pchannel ultra-thin film SO1 MOSFETs for a wide temperature range. A strong reduction of the parasitic bipolar transistor is obtained with decreasing the temperature (at 77K) and with a grounded substrate. However, the action of the PBT is not completely suppressed even at 77K with a body terminal. Substantial deviations from the traditional bell-shaped curves are found for the substrate current in Nand Pchannel SO1 devices and are attributed to the PBT carrier transport. The influence of these special SO1 mechanisms on gate current is also underlined. Finally, original variations of hot carrier effects as a function of the temperature are shown and explained by the aforementioned SO1 electrical properties and the differences between inversion and accumulation-mode devices.

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تاریخ انتشار 2016