Characterization of thermally treated PECVD SiON layers
نویسنده
چکیده
PECVD Silicon Oxynitride (SiON) layers with different refractive indices (1.472-1.635) were grown and characterized. The as-deposited layers have good thickness uniformity (~1%) and a high homogeneity of the refractive index (~ 5x10-4) over the wafer area. For telecommunication application, however, the optical losses of the as-deposited layers are unacceptably high. Therefore, the loss reduction upon annealing as well as the impact of the elevated temperature on the remaining layer properties has been studied. Annealed waveguides with optical losses as low as 0.2 dB/cm at λ = 1550 nm have been realized.
منابع مشابه
Stability of low refractive index PECVD silicon oxynitride layers
Low refractive index Silicon Oxynitride (SiON) layers were deposited by Plasma Enhanced Chemical Vapor Deposition (PECVD) using SiH4/N2 and N2O. At an index less than 1.473 the as-deposited layers appeared to be unstable in time and sensitive to moisture as could be observed by a spectroscopic ellipsometer. The stability, probably due to partly open structures, could be improved by deposition a...
متن کاملHigh Performance Optical Waveguides based on Boron and Phosphorous doped Silicon Oxynitride
Silicon oxynitride (SiON) is a highly attractive material for integrated optics, due to its excellent properties such as high transparency, adjustable refractive index and good stability. In general, the growth of SiON layers by plasma enhanced chemical vapor deposition (PECVD) is followed by a high temperature annealing step in order to remove hydrogen and to achieve low propagation losses in ...
متن کاملPlasma Enhanced Chemical Vapor Deposited (Pecvd) Silicon-Rich-Nitride Thin Films For Improving Silicon Solar Cells Efficiency
Silicon-rich-nitride (SRN) films were deposited by plasma enhanced chemical vapour deposition (PECVD) by changing the silane and ammonia flow rates. These films were thermally annealed for precipitation of silicon nanocrystals. Measurements of refractive indices and FTIR absorption spectra of these films indicated increase in the silicon content. Thermally annealed SRN films exhibited photolumi...
متن کاملPerformance Characterization of Coatings on Treated-wood
Coating performance is greatly influenced by the properties of the wood substrate. This study was focused on evaluating the performance of coatings on both preservative- and thermally-treated wood. A number of commercially formulated semi-transparent stains Alkyd, Alkyd-Acrylic and PU were applied on four different types of preservative treated and heat-treated wood and their performances were ...
متن کاملDeposition and Characterization of Pecvd Phosphorus- Doped Silicon Oxynitride Layers for Integrated Optics Applications
Phosphorus-doped silicon oxynitride layers have been deposited by a Plasma Enhanced Chemical Vapor Deposition process from N20, 2% SiH4/N2 and 5% PHdAr gaseous mixtures. The PH3/Ar flow rate was varied to investigate the effect of the dopant to the layer properties. As-deposited and annealed (600, 800, 900 and 1000 OC) layers were characterized by Fourier transform infrared spectroscopy, Ruther...
متن کامل