Synchrotron X-ray Microdiffraction Analysis of Proton Irradiated Polycrystalline Diamond Films
نویسنده
چکیده
X-ray microdiffiaction is a non-destructive technique that allows for depthresolved, strain measurements with sub-micron spatial resolution. These capabilities make this technique promising for understanding the mechanical properties of MicroElectroMechancial Systems (MEMS). This investigation examined the local strain induced by irradiating a polycrystalline diamond thin film with a dose of 2xlOI7 H'/cm2 protons. Preliminary results indicate that a measurable strain, on the order of lo", was introduced into the film near the End of Range (EOR) region of the protons.
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